5/30/2023 0 Comments Flexture joint![]() Mechanism based purely on flexure joints. Flexure Joints for Large Range of Motion - YouTube 0:00 / 5:24 UNIVERSITEIT TWENTE Flexure Joints for Large Range of Motion 70,517 views Research by the PE lab at the University. Motion stage that can support the weight of the stage and guide the motion by a This research is, to our knowledge, the first work for developing a macro Laser interferometer providing real-time position feedback has been fabricated.Įxperiments are performed to characterize motion straightness, repeatability, A single axis motion stage actuated by a high-resolution linear motor with a ![]() Dynamic models are developed for fullyĬompliant machines to understand the dynamic behavior of the flexure based XY Compliance arising from flexure joints in precision mechanisms, multi-rigid-body. Advanced kinematic techniques such as screw system theory are used toĪchieve a good kinematic design. Method 2: For the robots with position controlled joint actuators. Incorporate symmetry to cancel out the effects of center shifting in large motionįlexures. It can provide large motion range of greater than 8” x 8” to support a substrateĭuring semiconductor manufacturing. This stage is not a dual servo stage, but Weight support mechanism of the motion stage is made of links and flexure joints, and a linear motor is used as the actuator. This dissertation presents a large displacement flexure based nano-precision XY positioning stage for vacuum-based semiconductor equipment. ![]() Flexures also lead to less expensive designs asĬompared to magnetically-driven bearings. The use of air bearings in vacuum leads to complicatedĭesigns making flexures attractive. It is believed that large motion flexure based XY stages can be a cost-effective solution for semiconductor applications, particularly the ones that Motion range to size ratios of less than 0.01 as compared 0.5 or higher in this Existing flexure-based translation stages usually have Flexures are widely used in precision machines since they offerįrictionless, particle-free, and low maintenance operation, and they provideĮxtremely high resolution.
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